Provided is a pyrolysis furnace having a gas flowing path controller with
an improved structure. The pyrolysis furnace includes: a silicon
substrate; a main body of the pyrolysis furnace; a heating unit that is
formed around the main body and controls the temperature of the main
body; at least one gas supplying tube through which a gas flows into the
main body; and a gas flowing path controller that is installed inside the
main body and controls the flow of the gas. As a result, controlling and
manufacturing of small-sized nanoparticles with excellent characteristics
is possible.