There is provided a fluorescent X-ray analysis apparatus in which a
detection lower limit is improved, and it is possible to quantify a trace
aimed element having been contained not only in a sample whose main
component is a heavy element but also in a sample whose main component is
a light element. The fluorescent X-ray analysis apparatus possesses a
sample base supporting the sample, an X-ray source irradiating a primary
X-ray with a predetermined irradiation position being made a center, and
a detector disposed toward the irradiation position and detecting a
fluorescent X-ray generated from the sample. The sample base has a
detachable sample holding tool fixing the sample while being approached
to the X-ray source and the detector, and a measurement is possible by
selectively disposing the sample in any one of a 1st inspection position
in which an irradiated face is coincided with the irradiation position,
or a 2nd inspection position in which the sample is fixed to the sample
holding tool, an irradiated face is approached to the X-ray source, and
an inspected face is approached to the detector.