A microscope with evanescent sample illumination and a method for testing samples are disclosed. A first evanescent field, which exhibits a first penetration depth in the sample, and a second evanescent field, which exhibits a second penetration depth in the sample that is greater than the first penetration depth, are produced. A detector is provided that detects the first detection light, which exits from the part of the sample illuminated with the first evanescent field, and which produces first detection light data therefrom, and the second detection light, which exits from the part of the sample illuminated with the second evanescent field, and which produces second detection light data therefrom. Furthermore, a processing module is provided for processing the first and second detection light data.

 
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< Apparatus and method for determining surface properties

> Spectroscopic ellipsometer and polarimeter systems

> Position determination that is responsive to a retro-reflective object

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