A stage apparatus includes a stationary support plate; a stage member
provided on the stationary support plate so as to move on a reference
plane parallel with the stationary support plate; Y-direction magnetic
flux generating devices secured to one of the stationary support plate
and the stage member; and Y-direction moving coils secured to the other
of the stationary support plate and the stage member, the Y-direction
moving coils receiving magnetic flux from the Y-direction magnetic flux
generating devices so as to generate a driving force in a specific
Y-direction between the Y-direction magnetic flux generating devices and
the Y-direction moving coils. The Y-direction moving coils are secured to
the stage member so that the Y-direction moving coils at least partly
overlap each other in an X-direction, which is parallel with the
reference plane and perpendicular to the Y-direction, and do not overlap
in the Y-direction.