Aspects of the present invention provide for a novel photomask for
patterning features for an integrated circuit, the photomask including
masked features having interior nonprinting windows. In some embodiments,
the interior nonprinting window is an alternating phase shifter, while
the area surrounding the masked features transmits light unshifted. In
other embodiments, the interior nonprinting window transmits light
unshifted, while the area surrounding the masked features is an
alternating phase shifter. Thus any arrangement of features can be
patterned with no phase conflict.