A photo-resist dispensing apparatus is disclosed and comprises; a tank
adapted to hold a photo-resist solution, a pump unit adapted to pump the
photo-resist solution from the tank, a filter unit adapted to receive the
photo-resist solution from the pump unit, and at least one of a first gas
discharge unit connected to the tank and adapted to remove gas bubbles
from the photo-resist solution held in the tank, and a second gas
discharge unit connected to the filter unit and adapted to remove gas
bubbles from the photo-resist solution in the filter.