A plurality of substrates is transported to accurate positions, while mounted on one hand of a transport robot. When the substrates are to be transported from a transporting chamber into a processing chamber, a first mounting portion of a hand is located immediately above a first processing position provided in the processing chamber; and the substrate placed on the first mounting portion is lifted up. Then, a second mounting portion is located immediately above a second processing position by finely moving the hand. Next, the substrate on the second mounting portion is lifted up. When the hand is pulled out from between the substrates and the first and second processing positions and the substrates are lowered, the substrates are accurately arranged on the first and second processing positions. When the substrates are mounted on the hand in an order reverse to the above, the substrates in the processing chamber can be accurately mounted on the first and second mounting portions and be carried out.