In general, in one aspect, the invention features a system including a
light source, a plurality of interferometers configured to receive light
from the light source and to form output light, each interferometer
including a first optic and a second optic, the first and second optics
configured to be mounted on a first object and a second object,
respectively, where first object is moveable with respect to the second
object, the first and second optics being configured introduce an optical
path length difference (OPD) between two components of the light to form
the output light, the OPD being related to the position of the first
optic with respect to the second optic. The system further includes a
plurality of detectors configured to detect the output light from the
interferometers, a modulation apparatus in the optical path between the
light source and the detectors, the modulation apparatus being configured
to vary an OPD between the two components of the light over a range
including OPDs for which a net OPD of the output light from at least one
of the interferometers at the detectors is zero, a plurality of
waveguides configured to direct light between the interferometers, the
modulation apparatus, and the detectors, and an electronic controller in
communication with the detectors, the electronic controller being
configured to determine information about a position of the first object
based on the detected output light from at least one of the
interferometers.