In general, in one aspect, the invention features a system that includes a
first object mounted relative to a second object, the first object being
moveable with respect to the second object. The system includes a
plurality of interferometers each configured to derive a first wavefront
and a second wavefront from input radiation and to combine the first and
second wavefronts to provide output radiation including information about
an optical path length difference between the paths of the first and
second wavefronts, each interferometer including a reflective element
positioned in the path of the first wavefront, and at least one of the
interferometer's reflective element is mounted on the first object. The
system also includes a plurality of fiber waveguides and an electronic
controller. Each fiber waveguide is configured to deliver the input
radiation to a corresponding interferometer or deliver the output
radiation from the corresponding interferometer to a corresponding
detector. The electronic controller is configured to monitor a degree of
freedom of the first object relative to the second object based on the
information from at least one of the interferometers, wherein the degree
of freedom is an absolute displacement between the first and second
objects.