An approach for fabricating cantilever probes for a probe card assembly
includes forming posts on conductive traces on a substrate. A beam panel
having beam elements formed therein is aligned to the substrate so that
the beam elements are in contact with the plurality of posts. Each beam
element is in contact with a post at a portion of the beam element so
that both a first end portion and a second end portion overhang the post
element. Each beam element is also attached to the beam panel by the
first end portion. The beam elements are bonded to the plurality of
posts. The first end portion of each beam element is cut, for example
using an electrode, laser ablation or by dicing, to release the beam
element from the beam panel. The beam panel is then removed, leaving the
beam elements attached to the posts.