Disclosed is a method of fabricating carbon nanotubes and carbon nano particles, the method comprising: providing a plurality of carbon micro carriers on a silicon substrate; forming a plurality of carbon nano particles on the carbon micro carrier by a first gas; and reacting with a second gas to provide a plurality of carbon nanotubes. Thus the carbon nanotube can be formed without the use of a metal catalyst. The carbon nanotubes can easily separate from each other without the problem of non-uniformity, because the carbon micro carrier used is in a microscale size.