An actinic-ray- or radiation-sensitive resin composition comprises (A) a
resin that when acted on by an acid, exhibits an increased solubility in
an alkali developer, (B) a compound that when exposed to actinic rays or
radiation, generates an acid, (C) a resin containing two or more resins
(c) each having at least either a fluorine atom or a silicon atom, and
(D) a solvent.