Methods in accordance with aspects of this invention form microelectronic
structures in accordance with other aspects of this invention, such as
non-volatile memories, that include (1) a layerstack having a pattern
including sidewalls, the layerstack comprising a resistivity-switchable
layer disposed above and in contact with a bottom electrode, and a top
electrode disposed above and in contact with the resistivity-switchable
layer; and (2) a dielectric sidewall liner in contact with the sidewalls
of the layerstack; wherein the resistivity-switchable layer includes a
carbon-based material, and the dielectric sidewall liner includes an
oxygen-poor dielectric material. Numerous additional aspects are
provided.