A transport apparatus which can properly transmit a rotary driving force
of a rotating motor to a transport arm and can correctly detect an angle
of rotation of a rotary driving shaft, thereby transporting an object to
be transported in a transport unit to a correct position. The transport
apparatus includes: a housing having an airtight structure; first to
third driving shafts that are provided in the housing to be independently
rotatable around a predetermined coaxial rotary shaft; permanent magnets
arranged at predetermined positions of the first to third driving shafts,
respectively; and electromagnetic coils provided in the housing to
correspond to the respective permanent magnets. Driving currents are
supplied to the electromagnetic coils based on predetermined information,
so as to move the first to third driving shafts. The object to be
transported is transported by first and second linkages fixed to the
first to third driving shafts.