An integrated hybrid microfluidic-IC platform for single cell manipulation
and microscopy and method for making the platform. In particular, the
integrated platform can incorporate a planar microcoil embedded in a
silicon substrate that is subsequently used to fabricate a CMOS IC for
the platform. The CMOS IC circuitry provides a two dimensional array of
microsites that can incorporate an electrode (microelectrode), sensors,
and control logic. A direct conversion receiver (DCR) can also be
embedded within the CMOS circuitry to create an integrated IC platform. A
microfluidic chamber can be formed on the integrated IC platform. The
integrated hybrid platform can provide an increased sensitivity for mass
limited samples and high resolution manipulation of biological cells. In
addition, individual cell manipulation can be performed via
dielectrophoresis (DEP).