An object of the invention is to prevent migration of silver contained in
an electrode of a Group III nitride-based compound semiconductor
light-emitting device. A positive electrode is formed on a p-type layer.
In the positive electrode, an ITO light-transmitting electrode layer, a
silver alloy reflecting electrode layer, a diffusion-preventing layer in
which a Ti layer and a Pt layer are stacked, and a gold thick-film
electrode are sequentially stacked on the p-type layer. The reflecting
electrode layer made of a silver alloy contains palladium (Pd) and copper
(Cu) as additives and also contains oxygen (O). By virtue of this
structure, migration of silver from the silver alloy reflecting electrode
layer and blackening of the interface between the silver alloy layer and
the ITO light-transmitting electrode layer disposed thereunder are
prevented, whereby light extraction efficiency can be enhanced.