A method for manufacturing a nitride semiconductor laser element, equipped
with a laminate that has a first conductivity type nitride semiconductor
layer, an active layer, and a second conductivity type nitride
semiconductor layer on a substrate, and constitutes a resonator,
comprises the steps of: forming a first auxiliary groove having an
exposed region extending in the resonator direction of the laser element
and in which at least the second conductivity type nitride semiconductor
layer and the active layer are removed from the second conductivity type
nitride semiconductor layer side on both sides in the resonator direction
of an element region where the laser element is formed on the surface of
the laminate, thereby exposing the first conductivity type nitride
semiconductor layer, and two protrusion regions that are narrower than
the exposed region and protrude in the resonator direction from the
exposed region; forming a second auxiliary groove whose angle of
inclination of the side faces with respect to the normal direction versus
the substrate surface is greater than that of the first auxiliary groove
within the exposed region; and dividing the substrate and the laminate
with using the second auxiliary groove.