The present invention includes a method of creating a Site-Dependent (S-D) evaluation library including receiving a plurality of S-D wafers by one or more S-D transfer subsystems in a processing system, establishing wafer state data for each S-D wafer, establishing a library-creation processing sequence for creating a library of S-D evaluation data, determining a first number of S-D process wafers to be processed, establishing first operational states for a plurality of S-D processing elements in one or more processing subsystems, determining a first number of available processing elements, establishing a first S-D transfer sequence, transferring the first number of S-D process wafers to the first number of available processing elements therein and applying a first corrective action.