Methods and apparatus for performing scatterometry measurements of
biological samples as described herein. A substrate having formed therein
one or more sample wells is provided. Each sample well is configured to
hold a sample solution containing objects that are to be characterized
based on their light scattering properties. One or more sample solutions
are dispensed into the sample wells. A specular reflection reducing
element is applied to at least some of the sample solutions in the sample
wells to decrease reflections of light into one or more detectors. A
light beam is directed from a light source onto the objects in the sample
wells. Light scattered by the objects in the sample wells is collected
and transmitted to one or more detectors. The signal from the detectors
is analyzed to detect the one or more characteristics of the one or more
samples.