A semiconductor mask correcting device is provided with an image acquiring
unit acquiring a mask image, an extraction unit extracting only a main
pattern from the mask data, an inspection unit inspecting a defective
portion by comparing the extracted main pattern with a main pattern which
is obtained from the mask image after a drawing by matching to each
other, and a correction unit correcting the defective portion specified
by the inspection unit, wherein the extraction unit includes a
recognition section recognizing the main pattern and the assist pattern
as a figure, a specification section specifying the assist pattern from
figures which is recognized on the basis of a predetermined condition,
and a main pattern extracting section extracting as the main pattern a
figure other than the assist pattern.