A hydrogel-driven micropump, comprising: two fluid chambers; a fluid
channel, connecting the two fluid chambers; a first substrate plate and a
second substrate plate, which are glass wafers produced by
micromechanical working, each having accommodation chambers which are
filled in hydrogel which are placed next to the two fluid chambers and
connected by inward extending bridges, with electric terminals leading to
the accommodation chambers; a middle substrate, sandwiched between the
first and second substrate plates and made by a bulk micromachining
process, having separated accommodation chambers close to ends thereof. A
separating block is placed between the accommodation chambers. The middle
substrate between the first and second substrate plates forms a micropump
body. All of the substrates are separated by membranes. The accommodation
chambers for electrophoretic fluid are located between the membranes and
the first and second substrate plates, respectively, and insulating
material. An electrophoretic fluid channel is left between the membranes
and the bridges. The fluid channel is placed within the middle substrate
between the membranes. The first substrate plate has through holes from
outside to the two fluid chambers, allowing fluid to be injected.