A microelectromechanical system (MEMS) device includes a first electrode,
a second electrode electrically insulated from the first electrode, and a
third electrode electrically insulated from the first electrode and the
second electrode. The MEMS device also includes a support structure which
separates the first electrode from the second electrode and a reflective
element located and movable between a first position and a second
position. The reflective element is in contact with a portion of the
device when in the first position and is not in contact with the portion
of the device when in the second position. An adhesive force is generated
between the reflective element and the portion when the reflective
element is in the first position. Voltages applied to the first
electrode, the second electrode, and the third electrode at least
partially reduce or counteract the adhesive force.