Provided are a plastic microfabricated structure, and a microfabricated
thermal device, a microfabricated reactor, a microfabricated reactor
array and a micro array using the same, which may be applied to a bio
chip, and the present invention may fabricate the plastic microfabricated
structure for providing a heating region by means of insulating plastic,
which has a thin thickness, flatness enough to allow a photolithography
process to be performed, thermal isolation in its some or total area, and
a small thermal mass, and on top of the heating region of the plastic
microfabricated structure, a heater, a temperature sensor for sensing a
temperature, an electrode, and an electrode pad are formed to thereby
fabricate the microfabricated heating device, whereby element may be
readily fabricated at a low cost, and the heating region is formed of a
plastic thin layer, so that uniform temperature control is possible even
with a low power, and various samples may be thermally treated at a fast
speed to obtain their reaction and analysis.