An apparatus and method for wafer level fabrication of high value
inductors directly on top of semiconductor integrated circuits. The
apparatus and method includes fabricating a semiconductor wafer including
a plurality of dice, each of the dice including power circuitry. Once the
wafer is fabricated, then a plurality of inductors are fabricated
directly onto the plurality of dice on the wafer and are in electrical
contact with a switching node of the power circuitry on each die
respectively. The inductors are fabricated by forming a plurality of
magnetic core inductor members on an interconnect dielectric layer for
each die on the wafer. An insulating layer and then inductor coils are
then formed over the plurality of magnetic core inductor members over
each die. A layer of magnetic paste is also optionally provided over each
inductor coil to further increase inductance.