A sputtering apparatus allowing thick targets and method of making the
same. The apparatus includes a sputtering target with a glow discharge
plasma formed thereon during sputtering. The sputtering target is
disposed in a plane, with a front of the plane defined as the side on
which the glow discharge plasma is located during sputtering and a back
of the plane defined as the opposite side. The sputtering apparatus also
includes a magnetic circuit with an electrically floating center pole and
an electrically floating outside pole. Both the center pole and outside
pole are at least partially disposed on the front side of the plane
defined by the sputtering target.