A nano data writing and reading apparatus using a cantilever structure
includes a cantilever formed by patterning a deposition material
deposited on a sacrificial substrate, a probe formed at a front end
portion of one surface of the cantilever and formed simultaneously with
the cantilever as the deposition material is filled in a probe groove
pattern formed on the sacrificial substrate when the deposition material
is deposited on the sacrificial substrate, a heater formed of
polycrystalline silicon at the cantilever, for heating the probe, a data
sensing unit formed at the cantilever and sensing data written on media,
a signal connection pad connected to the data sensing unit and formed at
the cantilever to provide an electrical connection with an external
signal line, a signal transfer circuit unit connected to the signal
connection pad, for controlling writing and reading of data on and from
the media, and a bonding unit allowing the cantilever to be supported at
the signal transfer circuit unit and providing a passage for an
electrical connection between the signal connection pad and the signal
transfer circuit unit. Accordingly, the cantilever and the probe can be
precisely formed by a molding technique through the removal of a
sacrificial substrate and are formed of a deposition material such as a
silicon nitride material, thereby remarkably reducing variations in a
thickness of the cantilever and improving the durability of the probe.
Also, because a bonding process with a glass wafer for fabricating the
cantilever structure is not required, the process is facilitated and a
fabrication coast is greatly reduced.