A development apparatus has a holder which horizontally holds a substrate,
a nozzle which supplies a developer to a resist film on the substrate
held by the holder, a liquid flow suppressing member whose size in a
two-dimensional plane viewing field is equal to or larger than that of
the substrate and which has a mesh having many openings and hydrophilic
properties with respect to the developer and transmits the developer
supplied from the nozzle through the openings of the mesh to form a
liquid film of the developer between the mesh and the substrate, and a
moving mechanism which movably supports this liquid flow suppressing
member, sets the mesh to face the resist film on the substrate and brings
the mesh into contact with a surface of the liquid film of the developer
or immerges the mesh in the liquid film.