A resist composition comprises two or more polymers containing a first
polymer and a second polymer and a compound that when exposed to actinic
rays or radiation, generates an acid, wherein when the resist composition
is formed into a dry resist film, the mixing ratios of at least the first
and second polymers in the resist film exhibit a gradient distribution
such that the mixing ratios continuously change in entirety or partially
in the direction of the depth from the surface of the resist film on the
air side toward a support, and wherein the mixing ratio of the first
polymer at a superior portion of the resist film is higher than that of
the second polymer, while the mixing ratio of the second polymer at an
inferior portion of the resist film is higher than that of the first
polymer.