To improve characteristics by achieving size reduction and high Q value
with a simple structure. A vibratory gyrosensor 1 according to the
present invention includes a supporting substrate 2, which has a circuit
element mounted thereon and a wiring pattern having a plurality of lands
4 disposed thereon; and a vibration element 20 mounted on a surface 2-1
of the supporting substrate. The vibration element 20 includes a base
portion 22 having a mounting surface 22-2 provided with a plurality of
terminals 25 that are connected to the lands; and a vibrator portion 23
extending integrally from a side of the base portion 22 in a cantilever
manner and having a substrate-facing surface which is flush with the
mounting surface of the base portion 22, the substrate-facing surface
being provided with a first electrode layer 27, a piezoelectric layer 28
stacked on the first electrode layer, and a second electrode layer 29, 30
stacked on the piezoelectric layer. The vibration element 20 is mounted
on the supporting substrate 2 by joining the terminals 25 to the lands 4
with metallic projections 26 disposed therebetween.