In a flash memory device, which can maintain an enhanced electric field
between a control gate and a storage node (floating gate) and has a
reduced cell size, and a method of manufacturing the flash memory device,
the flash memory device includes a semiconductor substrate having a pair
of drain regions and a source region formed between the pair of drain
regions, a pair of spacer-shaped control gates each formed on the
semiconductor substrate between the source region and each of the drain
regions, and a storage node formed in a region between the control gate
and the semiconductor substrate. A bottom surface of each of the control
gates includes a first region that overlaps with the semiconductor
substrate and a second region that overlaps with the storage node. The
pair of spacer-shaped control gates are substantially symmetrical with
each other about the source region.