A method of fabricating composite substrates by associating a transfer
layer with an intermediate support to form an intermediate substrate of
predetermined thickness with the transfer layer having a free surface;
providing a sample carrier having a surface and a recess that has a depth
that is approximate the same as the predetermined thickness of the
intermediate substrate so that the transfer layer free surface is
positioned flush with the sample carrier surface; providing a support
layer both on the transfer layer free surface and on a portion of the
sample carrier surface surrounding the recess; removing the portion of
the support layer that extends beyond the intermediate substrate; and
detaching the transfer layer and support layer from its intermediate
support to form the composite substrate. The support layer is made of a
deposited material that has a lower quality than that of the intermediate
support. A bonding layer may be included on one of the intermediate
support or the useful layer, or both, to facilitate bonding of the
layers. The final substrates are useful in optic, electronic, or
optoelectronic applications.