A system for probing a DUT is disclosed, the system having a pulsed laser
source, a CW laser source, beam optics designed to point a reference beam
and a probing beam at the same location on the DUT, optical detectors for
detecting the reflected reference and probing beams, and a collection
electronics. The beam optics is a common-path polarization differential
probing (PDP) optics. The common-path PDP optics divides the incident
laser beam into two beams of orthogonal polarization--one beam simulating
a reference beam while the other simulating a probing beam. Both
reference and probing beams are pointed to the same location on the DUT.
Due to the intrinsic asymmetry of a CMOS transistor, the interaction of
the reference and probing beams with the DUT result in different phase
modulation in each beam. This difference can be investigated to study the
response of the DUT to the stimulus signal.