A probe instrument having a probe that interacts with a sample surface to
perform a mechanical property measurement at high speed includes a
scanner producing relative motion between the sample and the probe. In
addition, a probe actuator produces relative motion between the sample
and the probe, in a generally vertical direction, and a controller that
generates a scanner drive signal and an actuator drive signal. The probe
actuator is responsive to the actuator drive signal and has an operable
bandwidth of at least about 50-80 kHz to perform the fast force curve
measurements. The probe actuator is preferably located at least partially
on the cantilever. Moreover, feedback during normal operation may be
interrupted to perform a force curve measurement with the integrated
actuator.