A semiconductor device fabrication method in which when a semiconductor
device with a built-in light receiving element is fabricated, a section
for dividing the light receiving element is protected from damage caused
by, for example, etching. An antireflection coating is formed not only on
a light receiving area in a divided photodiode area but on a division
area including a junction area between a division section outside the
light receiving area for dividing a photodiode and a cathode. A
polycrystalline silicon film is formed so as to cover the antireflection
coating. Accordingly, the antireflection coating on the junction area
between the division section outside the light receiving area and the
cathode is protected against, for example, etching by the polycrystalline
silicon film. As a result, the appearance of a crystal defect, a change
in impurity concentration, or the like is suppressed in this area.
Therefore, a high-performance high-quality semiconductor device with a
built-in photodiode can be fabricated.