Various novel apparatuses and methods for generating X-rays are disclosed.
In some embodiments, for example, an apparatus may be configured and
arranged so that, for at least one interception point on a particular
portion of a scan path on a surface of a target along which a steering
element steers an accelerated electron beam (e-beam), both an angle and
its complement between a line corresponding to a direction in which the
accelerated e-beam is traveling at the interception point and a line
oriented normal to the surface of the target at such interception point
are greater than forty five degrees.