A surface-profile measuring instrument includes a movement-estimating unit
that estimates a movement state of a drive mechanism in accordance with a
scanning vector command issued by a scanning vector commanding unit to
calculate an estimated movement state quantity, and a correction
calculating unit that corrects a detection value of a drive sensor in
accordance with the estimated movement state quantity calculated by the
movement-estimating unit. The movement-estimating unit has a nominal
model setting unit in which a nominal model from the scanning vector
commanding unit to the probe is set. The correction calculating unit
includes a correction-amount calculating unit that calculates a
correction amount for correcting a measurement error generated by a
deformation of the drive mechanism in accordance with the movement
thereof and a measurement data synthesizing unit that synthesizes the
detection value of the drive sensor and the displacement sensor and the
calculated correction-amount calculated by the correction-amount
calculating unit.