Memory cells, and methods of forming such memory cells, are provided that
include a carbon-based reversible resistivity switching material. In
particular embodiments, methods in accordance with this invention form a
memory cell by (a) depositing a layer of the carbon material above a
substrate; (b) doping the deposited carbon layer with a dopant; (c)
depositing a layer of the carbon material over the doped carbon layer;
and (d) iteratively repeating steps (b) and (c) to form a stack of doped
carbon layers having a desired thickness. Other aspects are also
provided.