A self-stabilized, levitating MEMS (Micro Electro-Mechanical Systems) resonator is provided for detection of magnetic resonance spectra of electrons and nuclei in magnetic resonance force microscopy (MRFM) measurements. The present MRFM system includes a levitating micro-disk having electrically-controlled force sensitivity. To achieve imaging on the scale of a single nuclear spin, the force sensitivity of the measurement must be on the order of 1 aN (atto-Newton) or less. For about a 1 aN force to produce deflections comparable to an angstrom for interferometer detection, the stiffness or spring constant (k) of the resonator will typically be less than 1 .mu.N/m (micro-Newtons per meter). Since the resonator is to be driven with an oscillating force at its resonance, there is a quality-factor (Q) enhancement of the amplitude of the motion. As a result, the k/Q ratio is preferably less than 1.times.10.sup.-8 N/m and is achievable with the contemplated levitating micro-disk resonator.