Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.

 
Web www.patentalert.com

< Monolithic Clock Generator and Timing/Frequency Reference

> FILTER, DUPLEXER, AND COMMUNICATION APPARATUS

> Mechanical latch locking detection sensors
~ 00579