New polymers and new anti-reflective compositions containing such polymers
are provided. The compositions comprise a polymer (e.g., epoxy cresol
novolac resins) bonded with a chromophore (4-hydroxybenzoic acid,
trimellitic anhydride). The inventive compositions can be applied to
substrates (e.g., silicon wafers) to form anti-reflective coating layers
having high etch rates which minimize or prevent reflection during
subsequent photoresist exposure and developing.