A pattern inspection apparatus includes an optical image acquiring unit
that acquires optical image data of a target plate formed as a pattern.
The pattern inspection apparatus also includes a design image data
generating unit that generates first design image data based on a first
design pattern serving as a base of pattern formation of the target
plate. The pattern inspection apparatus additionally includes a comparing
unit that compares the optical image data and the first design image data
with each other. Further, information of a second design pattern is input
in parallel with information of the first design pattern to the pattern
inspection apparatus. In the comparing unit, second design image data
generated based on the second design pattern is further input, and the
optical image data is compared with the second design image data in place
of the first design image data.