Disclosed herein is a method for fabricating a reverse-staggered
polycrystalline silicon thin film transistor, and more specifically a
method for fabricating a reverse-staggered polycrystalline silicon thin
film transistor wherein a phosphosilicate-spin-on-glass (P-SOG) is used
for a gate insulating film. The method comprises the steps of: forming a
buffer layer on an insulating substrate; forming a gate metal pattern on
the buffer layer; forming a planarized gate insulating film on the gate
metal pattern; depositing an amorphous silicon layer on the gate
insulating film; crystallizing the amorphous silicon layer into a
polycrystalline silicon layer; forming a n+ or p+ layer on the
polycrystalline silicon layer; forming a source/drain metal layer on the
n+ or p+ layer; and forming a passivation layer on the source/drain metal
layer.