A method for detection and analysis of impurity content of refined
metallurgical silicon includes: (1) select the measuring points on the
crystal rods or crystal ingots along the crystallization direction,
measuring the resistivity at each measuring point and acquire the
measured value of resistivity according to the distribution of
crystallized fraction; (2) get the estimated value of the content of
boron and phosphorus at each measuring point and calculate the estimated
net redundant carrier concentration and the measured value of
resistivity; (3) compare the estimated value of net redundant carrier
concentration with that of the measured value, and adjust the estimated
value of impurity content in the silicon material to get the new
estimated net redundant carrier concentration, and use regression
analysis to determine the impurity content distribution of boron and
phosphorus; (4) get the average impurity content of boron and phosphorus
in the silicon material according to the distribution status of impurity
based on all the measuring points. This invention can detect the impurity
contents of boron and phosphorus in refined metallurgical silicon, while
the operation is simple, low-cost and suitable for industrial
applications.