A pressure of a laser gas in an enclosure (7) is detected by a gas
pressure sensor (12), and a pressure comparison circuit (13) determines
whether the thus-detected pressure is normal or anomalous. An electric
current output from an inverter (10) that drives a blower (5) to cause a
laser gas to flow back, is detected by a current detection circuit (9). A
current comparison circuit (11) determines whether or not the output
current is normal or anomalous. A result of a pressure comparison circuit
(13) and a result of the current comparison circuit (11) are sent to an
AND circuit (15) and performed AND processing. A result of the AND
circuit (15), a result of the current detection circuit (9), and a result
of the gas pressure sensor (12) are sent to a comparison operation
section (17) in a controller (14). A determination is made as to whether
or not the blower is anomalous. When the blower is determined to be
anomalous, a signal is output to an oscillator and a machine control
section (18), to thus stop the oscillator and the machine. Thereby, an
anomaly in the blower (5) can be detected regardless of fluctuations in
the pressure of the laser gas.