An electro-optic modulator includes a substrate made of a material which
has an electro-optic effect and a pyroelectric effect. In the substrate,
an optical waveguide is formed to have at least a pair of optical paths.
On the substrate and on the optical waveguide, a transparent buffer layer
is formed to cover the optical waveguide. On the buffer layer, first and
second electrodes are formed so that the first and the second electrodes
are arranged to cause refractive index changes in the pair of optical
paths in response to electrical fields surrounding the electro-optic
modulator. The buffer layer is a mutual diffusion layer. The mutual
diffusion layer is made from laminated films having at least one
transparent insulator film and at least one transparent conductor film
but has no clear boundary between the transparent insulator film and the
transparent conductor film.