A memory element having a resistance variable material and methods for
forming the same are provided. The method includes forming a plurality of
first electrodes over a substrate and forming a blanket material stack
over the first electrodes. The stack includes a plurality of layers, at
least one layer of the stack includes a resistance variable material. The
method also includes forming a first conductive layer on the stack and
etching the conductive layer and at least one of the layers of the stack
to form a first pattern of material stacks. The etched first conductive
layer forming a plurality of second electrodes with a portion of the
resistance variable material located between each of the first and second
electrodes.