A method for fabricating an ultra-sensitive metal oxide gas sensor is
disclosed, which comprises the steps of spinning a mixture solution
including a metal oxide precursor and a polymer onto a sensor electrode
to form a metal oxide precursor-polymer composite fiber; thermally
compressing or thermally pressurizing the composite fiber; and thermally
treating the thermally compressed or thermally pressurized composite
fiber to remove the polymer from the composite fiber. Since the gas
sensor includes a macro pore between nanofibers and a meso pore between
nano-rods and/or nano-grains, gas diffusion and surface area can be
maximized. Also, the ultra-sensitive sensor having high stability in view
of mechanical, thermal, and electrical aspects can be obtained through
rapid increase of adhesion between the metal oxide thin layer and the
sensor electrode.