The present invention relates to a film formation apparatus including a
first transfer chamber having a roller for sending a substrate, a film
formation chamber having a discharging electrode, a buffer chamber
provided between the transfer chamber and the film formation chamber or
between the film formation chambers, a slit provided in a portion where
the substrate comes in and out in the buffer chamber, and a second
transfer chamber having a roller for rewinding the substrate. The slit is
provided with at least one touch roller, and the touch roller is in
contact with a film formation surface of the substrate. In addition, the
present invention also relates to a method for forming a film and a
method for manufacturing a photoelectric conversion device that are
performed by using such a film formation apparatus.