A method of measuring a stress component in a short period of time in a
nondestructive manner and a stress component measurement device that
includes a stress component comparison section that compares a Raman
spectrum L obtained in a predetermined area W1 of a reference specimen W
to which a given stress component is applied with the stress component, a
correlation data production section that produces correlation data
indicating a correlation between the Raman spectrum L and the stress
component by the use of a multivariate analysis method based on the
comparison results conducted by the stress component comparison section.
The comparison is conducted multiple times on different predetermined
areas W1. A correlation data storage section stores the correlation data,
and a stress component calculation section calculates a stress component
applied to a measurement area W1' of a measurement specimen W' whose
composition is the same as that of the reference specimen W based on the
Raman spectrum L obtained from the measurement area W1' and the
correlation data.