An interconnect structure of the single or dual damascene type and a
method of forming the same, which substantially reduces the
electromigration problem that is exhibited by prior art interconnect
structures, are provided. In accordance with the present invention, a
grain growth promotion layer, which promotes the formation of a
conductive region within the interconnect structure that has a bamboo
microstructure and an average grain size of larger than 0.05 microns is
utilized. The inventive structure has improved performance and
reliability.